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WF₆

 
It is the only stable and industrialized type of tun-gsten fluoride at present. It is mainly used as the raw material of tungsten chemical vapor deposition (CVD) process in the electronics industry. WSi2 made from it can be used as wiring material in large-scale integrated circuits, as raw material of semiconductor electrode, fluoride agent, polymeri-zation catalyst and optical material, etc.
 
 
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