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Cl₆Si₂ (HCDS)

 
Hexachlorodisilane is the inorganic compound with the chemical formula Si₂Cl₆, It is a colorless liquid that fumes in most air. It has specialty applications in as a reagent and as a volatile precursor to silicon metal.
 
Application:Semiconductor/CVD
Purity:99.999%
CAS:13465-77-5
Package:Cylinder/Drum
 
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